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Course Title:Lithography and Nanofabrication
Class Info.:
Class Section:EEMF6348.501.11S Activity Type:Lecture
Class Level:Graduate Class Number:23794
Class Credits:3 Credits Inst. Mode:Face-to-Face
Grading:Graded - Graduate Session Type:Regular Academic Session (1)
Status:Section Status: OPEN    Available Seats: 28    Enrolled Total: 17   
Description:
EEMF 6348 - Lithography and Nanofabrication (3 semester hours) Study of the principles, practical considerations, and instrumentation of major lithography technologies for nanofabrication of devices and materials. Advanced photolithography, electron beam lithography, nanoimprint lithography, xray lithography, ion beam lithography, soft lithography, and scanning probe lithography, basic resist and polymer science, applications in nanoelectronics and biomaterials. (3-0) Y
Instructor(s):
Wenchuang Hu      email: wxh051000@utdallas.edu
Schedule:

Class Location and Times

Location: UT Dallas - Main Campus

Tuesday & Thursday:  5:30pm-6:45pm   ECSN 2.120

Term: Spring 2011
Session Type: Regular Academic Session (1)
Starts: January 10, 2011
Ends: May 11, 2011

ECSN Building - Floor 2 - Room 2.120
Cross Listed With:MSEN7V80.501.11S - Special Topics in Materials Science and Engineering
College:Erik Jonsson School of Engineering and Computer Science
Syllabus:A Syllabus for Lithography and Nanofabrication (eemf6348.501.11s) taught by Wenchuang Hu hasn't been posted.
Class Evaluation:Class Evaluation for Lithography and Nanofabrication (eemf6348.501.11s) taught by Wenchuang Hu.
The direct link to this class is: http://go.utdallas.edu/eemf6348.501.11s
Register for this class on Orion: http://orion.utdallas.edu